Description
DESCRIPTION
Applications
• Wet etch and clean
• Hot phosphoric acid
• Sulfuric acid
• Hydrofluoric acid
• Nitric acid
• Piranha
• SC1, SC2
• NMP-based solvents
• Other high temperature or ozonated processes
The Fluorocap®-SELECT encapsulated filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleating that increases filtration area and flow by over 25% compared to our standard Fluorocap®. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.
Benefits
• Large filtration area for longer life
• High flow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality
