Description
DESCRIPTION
Applications
• Wet etch and clean (90°C or less)
• Photochemicals
• DI water
The Trufluor +™ filter housing is designed for maximum chemical resistance and high purity for microelectronics applications. Constructed of PFA (wetted parts) and PVDF (non-wetted parts), this housing is compatible with the most aggressive chemistries. The high-purity materials of construction and cleanroom packaging insure a high level of cleanliness. The housing consists of a stationary bowl and locking ring that provides a positive seal and easy filter replacement. It is compatible with our Fluoroflow® line of all-fluoropolymer cartridges including the large-diameter. Fluoroflow®-XL in lengths of 10, 20 and 30 inches.
Benefits
• Excellent chemical resistance
• High-purity construction
• Packaged in cleanroom
• High flow rates
• Compatible with 2.75″ and 3.25″ diameter cartridges
