Fluoroflow®-HSA-UC Filter Cartridge (an Ultraclean product)

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Description

DESCRIPTION
Applications
• Semiconductor wet etch and clean
• Etching
• Stripping
• Cleaning
• Bull chemical deliveries
• Aggressive chemical application

Leading the industry in cleanliness, Fluoroflow-UC all-fluoropolymer cartridge filters exceed current standards by offering a <5ppb metals extractables level (16 metals, based on data for 10” cartridges). They are specially processed to meet customer needs in critical semiconductor processes such as etching, stripping and cleaning. All Ultraclean products are wet-packed to eliminate lengthy wetting procedures, to maximize equipment uptime and ensure superior cleanliness.

Benefits
• <5ppb extractables level for 16 metals
• All-fluoropolymer construction provides the highest degree of chemical compatibility
• High flow rates for efficient process operation
• Manufactured in a certified clean environment

Additional information

End Fitting

2, 3, 7, 8

Nominal Length

04, 10, 20, 30*

Filter Rating

923, 925, 001, 002

O-Rings

2, 4, 5, 6, 7, N

Options

E, H